SSRM CP-AFM light_emitting CompactDisk Imprint Polyethylene SICM Chromium Cobalt Workfunction ElectroChemical Pattern TungstenThinFilmDeposition MultiLayerCeramicCapacitor Lateral_Force_Microscopy mechanical property SFAs ContactModeDots EFM C36H74 Worcester_Polytechnic_Institute PetruPoni FrictionalForceMicroscopy epitaxy FM_KPFM HighResolution Piezoelectric INSP OpticalModulator Layer Semiconductor Regensburg Growth Boundary polyvinyl acetate