MechanicalProperty Bmp LiquidCell Trench aluminum_nitride Layer ULCA Optoelectronic Liquid PhaseChange Optic Phenanthrene Scanning_Thermal_Microscopy Biofilm high_resolution Spincast Granada Edwin HfO2 Electical&Electronics CVD Korea Molybdenum Pinpoint Change LaAlO3 HighResolution Fluoride fifber temperature controller AFM contact TappingMode sputter Mapping Monisha