nanomechanical TemperatureControl Hole Semiconductor Defect Bio SmallScan ScratchMode atomic_layer Polymer Polarization membrane kelvin probe force microscopy Phase CNT Tapping Tungsten_disulfide Fluoride DOE CVD Mapping Defects Mobile non_contact Sperm Kevlar CBD HafniumDioxide medical SiliconCrystal NanoLithography OrganicSemiconductor Ananth AmplitudeModulation lithography