sputter CopperFoil Polyvinylidene_fluoride Cobalt OxideLayer SThM Fluoride GaP Ito Pores MoS2 BiVO4 C36H74 Chloroform OpticalElement PrCurve UnivCollegeLondon IRDetector HighAcpectRatio margarine lithography AtomicLayer University_of_Regensburg hetero_structure Tungsten_disulfide Piranha CNT Holes Lanthanum_aluminate TemperatureControlledAFM Mechanical HanyangUniv multi_layer Fendb NtuEee