Defect Polytetrafluoroethylene Chemical_Vapor_Deposition MechanicalProperty MonoLayer silicon_oxide CrAu GranadaUniv HfO2 BFO Neodymium SicMosfet Polystyrene Carbon chemical_compound Wang graphene_hybrid CrossSection alkanes SetpointMode Self-assembledMonolayer CuSubstrate Deposition Lanthanum_aluminate Pvdf doped FastScan light_emitting piezoelectric force microscopy Mechanical Biology SiliconOxide Organic LateralForce PS_LDPE