Date: 24 March 2023

Time: 09.00 am - 4.00 pm

Venue:Park Systems - Applications Lab
Northeastern University Innovation Campus Building 5
147 South Bedford Street, Room 120, Burlington, MA 01803

Theoretical and hands-on sessions on Scanning Microwave Impedance Microscopy (sMIM), the most advanced electrical AFM measurement. Topics include semiconductors, insulators, buried structures, nanowires, image sensors, and emerging materials. Join this workshop for a live demonstration using PrimeNano's ScanWave on a Park NX20!

Abstract: Scanning Microwave Impedance Microscopy (sMIM) is a near-field scanning probe microscopy technique where an AFM cantilever is used as a microwave source to measure the electrical properties of materials at the nanoscale. Microwave signals are sent through an AFM cantilever and the reflected signal is collected. The reflected microwave signal is a measure of the impedance of the sample underneath the AFM tip. sMIM provides images of the variations in the local capacitance and conductance with nanoscale resolution making it an excellent method for characterizing a wide range of materials such as semiconductors, insulators, 1D/2D, ferroelectric materials and more.