Annealed UnivOfMaryland DOE Trench Plug FAFailureAnlaysis Copper SurfaceChange Yeditepe cannabidiol Optical StyreneBeads Phase OpticalElement ito_film SrTiO3 fluoroaalkane dielectric trench conductive Piranha Workfunction Device Sio2 CalciumHydroxide mechanical property Hafnia AlkaneFilm PolycrystallineFerroelectricBCZT StainlessSteel HexagonalBN temp Layer PolymerPatterns AtomicLayer FastScan