Global_Comm PolyvinylideneFluoride PVA Memory rubber HiVacuum University_of_Regensburg Wafer MoirePattern China InsulatorFilm Microchannel HDD LMF LiquidCell ElectroChemical Etch Topography Metal Singapore PECurve Hexacontane Heating non_contact Molybdenum Hole food EFM Hafnium_dioxide FailureAnlaysis TPU Epoxy SThM Array LateralPFM