Yeditepe_University SFAs Steps Copper NUSNNI PhaseChange Foil TungstenThinFilmDeposition MonoLayer Austenite INSP blended polymers ring shape Fluoride sputter VinylAlcohol Alloy Polypropylene TemperatureControl Chemical_Vapor_Deposition Step CaMnO3 Calcium 2dMaterials Styrene lithography Ceramic SiliconOxide MembraneFilter Inorganic_Compound Piranha Calcite solar_cell light_emitting SKPM