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aluminum_nitride Mobile Ceramic CrossSection AdhesionForce atomic_layer ConductingPolymer Piezoelectric TemperatureControlledAFM plastics Metal-organicComplex 2-vinylpyridine dielectric_trench HBN Anneal Pyroelectric PDMS Lateral Aluminum Solar HiVacuum ForceMapping thermal_property Korea Glass GlassTemperature MoirePattern Co/Cr/Pt mechanical property Chemical Vapor Deposition LeakageCurrent Polydimethylsiloxane Pvdf ShenYang PhaseChange