NCM\ EvatecAG C60H122 Mfm IndiumTinOxide lithography INSP PyroelectricDetector VerticalPFM IcelandSpar ferromagnetic BiasMode Device PhaseChange hard_disk_media Tin sulfide Filter Roughness Cross-section Annealed Hydroxyapatite University_of_Regensburg Polypropylene Trench FrictionalForce StyreneBeads I-VSpectroscopy Piranha Solution hetero_structure Morphology aluminum_nitride Mechanical&nanotechnology AlkaneFilm SelfAssembly