Imprint TungstenThinFilmDeposition SSRM Oxidation LiNbO3 Cancer cannabidiol CopperFoil Neodymium PatternedSapphireSubstrat atomic_layer WWafer SicMosfet silicon_carbide fluoroaalkane Alkane Crystal Microchannel PolymerBlend Litho Ferrite Floppy AdhesionForce Bismuth ScanningIon-ConductanceMicroscopy MoirePattern StrontiumTitanate GaAs dielectric_trench ForceMapping membrane LMF Optoelectonics SThM norganic