PolymerPatterns organic_polymer Chemical_Vapor_Deposition FailureAnalysis SiWafer FM-KPFM ULCA Cobalt multi_layer Hole nanomechanical Melt lithography University_of_Regensburg FAFailureAnlaysis gallium_nitride Hexatriacontane Tin sulfide Flake kelvin probe force microscopy Aggregated_molecules Filter MBE AM_SKPM oxide_layer PS_LDPE Litho Cross-section AdhesionEnergy MfmAmplitude Fendb Fujian chemical_compound Lateral_Force_Microscopy Styrene