Vanadate dielectric_trench HiVacuum multi_layer Varistor BoronNitride Switching NTU layers Tungsten optoelectronics NanoLithography silicon_oxide Steps University_of_Regensburg Cell ItoGlass Molybdenum_disulfide cross section hydrocarbon Microchannel Optoelectronic ULCA ReflexLens Mfm MagneticPhase Lateral_Force_Microscopy FailureAnlaysis light_emitting Silver PDMS plastic exfoliate MembraneFilter Granada