Piezoelectric Corrosion CVD fe_nd_b Scratch conductive phase_change Litho tip_bias_mode Electical&Electronics semifluorinated alkane TipBiasMode China medical SPMLabs ThermalDetectors high_resolution CrAu BaTiO3 membrane Graphene Beads KAIST PolyimideFilm Tungsten Cross-section Gallium cannabidiol Conductance LiNbO3 Galfenol Morphology Step Sphere BCZT