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Chip
Scanning Conditions
- System : NX-Wafer
- Scan Mode: Non-contact
- Scan Rate : All 1Hz
- Scan Size : 25μm×40μm, 15μm×40μm, 8μm×4μm
- Pixel Size : 2048×256, 2048×256, 1024×256
- Cantilever : OMCL-AC160TS(k=26N/m, f=300kHz)