EFM CaMnO3 Etch MESA structure Pvdf LateralPFM Sapphire Protein ScanningTunnelingMicroscopy Cobalt-dopedIronOxide Gold Force-distance KPFM Silver Indent Boron PANI FastScan HfO2 TCS MLCC Floppy Al2O3 NtuEee LiquidCrystal Stiffness ULCA Heating CNT GranadaUniv Polyimide TriGlycineSulphate P3HT TemperatureControllerAFM Vortex