Carbon membrane AM_KPFM CaMnO3 MetalCompound nanomechanical Bio DLaTGS ThermalDetectors PolymerBlend PrCurve ito_film Zhi Mechanical&nanotechnology Iron organic_polymer dielectric trench MembraneFilter Aggregated_molecules PtfeFilter SFAs IIT-chennai LiftMode DeflectionOptics Heat LiNbO3 vertical_PFM EvatecAG Change MBE KAIST Strontium Boron Patterns GaAs