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Leakage PDMS SicMosfet polymeric_arrays Transparent Pattern Co/Cr/Pt Temasek_Lab LiNbO3 ring shape CuFoil VortexCore Litho dielectric trench Plug vertical_PFM SrO Nickel Boron FailureAnlaysis OpticalElement Hafnia Silver PatternedSapphireSubstrat FrequencyModulation Biofilm Heat Microchannel TappingMode DomainSwitching Tape Graphite Titanate PolycrystallineFerroelectricBCZT MembraneFilter