lithography ULCA fluoroaalkane Worcester_Polytechnic_Institute PDMS AM_SKPM Korea Transparent University_of_Regensburg Vac FrictionalForce phase_change CHRYSALIS_INC Defects SFAs HighAspect ForceVolume Hafnium_dioxide Resistance graphene_hybrid Sio2 Pinpoint PFM BiVO4 Memory PVA Oxidation H-BN ring shape LiBattery food temperature_control BaTiO3 Lateral_Force_Microscopy FrequencyModulation Hexylthiophene