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Mo film
Scanning Conditions
- System : NX-Wafer
- Scan Mode: Non-contact
- Scan Rate : 0.5 Hz, 0.8 Hz
- Scan Size : 5μm2, 15μm2
- Pixel Size : All 1024×512
- Cantilever : OMCL-AC160TS (k=26N/m, f=300kHz)