Stage

XY stage travel range: 200 mm (Motorized) (150 mm optional),
optional precision encoders for better XY stage repeatability
Z stage travel range: 25.5 mm (Motorized),
optional precision encoder for better Z stage repeatability
Focus stage travel range: 8 mm (Motorized)

Sample Mount

Sample size: Up to 200 mm wafer sample
(Optional 200 mm Vacuum Sample Chuck)

On-Axis Optics

10x (0.21 N.A.) ultra-long working distance lens (1µm resolution)
Direct on-axis vision of sample surface and cantilever
Field-of-view : 480 × 360 µm (with 10× objective lens)
CCD : 1.2 M pixel, 5 M pixel (optional)
(optional; Field-of-view: 840 µm x 630 µm)

Software

SmartScan™

• AFM system control and data acquisition software
• Auto mode for quick setup and easy imaging
• Manual mode for advanced use and finer scan control

SmartAnalysis™

• AFM data analysis software
• Stand-alone design—can install and analyze data away from AFM
• Capable of producing 3D renders of acquired data

Electrical Properties

Conductive AFM (C-AFM)*
IV Spectroscopy*
Kelvin Probe Force Microscopy (KPFM)
Sideband FM-KPFM
Scanning Capacitance Microscopy (SCM)*
Scanning Spreading-Resistance Microscopy (SSRM)*
Scanning Tunneling Microscopy (STM)*
Photo Current Mapping (PCM)*

Chemical Properties*

Chemical Force Microscopy with Functionalized Tip
Electrochemical Microscopy (EC-AFM)

Accessories*

• Universal Liquid Cell with Temperature Control
• Temperature Controlled Stage 1, 2 and 3
• Electrochemistry Cell
• High-field Magnetic Field Generator