Chemical_Vapor_Deposition CrAu Layer TappingMode 2-vinylpyridine MonoLayer China TPU Strontium gallium_nitride ThermalDetectors HexacontaneFilm HafniumDioxide kelvin probe force microscopy PDMS PetruPoni_Institute University_of_Regensburg atomic_steps Carbon Indent Grain Electical&Electronics EvatecAG molecules Zhi SiWafer EFM dielectric trench Pyroelectric Fujian Beads Hafnia Dr.JurekSadowski Domain WWafer