Korea PyroelectricDetector Sio2 PECurve temp AnodizedAluminumOxide Wonseok semifluorinated alkane CalciumHydroxide SurfaceChange Scratch ForceMapping AtomicLayer ElectroChemical STO layers ReflexLens Microchannel PetruPoni_Institute LightEmiting MBE Plug rubber Vanadate PFM Worcester_Polytechnic_Institute TransitionMetal ScratchMode Nanostructure self-assembly mechanical property sputter HexagonalBN GranadaUniv bias_mode