Chromium IMT_Bucharest fifber EFM PhaseChange lithography CNT SKKU Deposition CVD small_scan Self-assembledMonolayer Reduction Hydroxyapatite MoirePattern Fet AtomicLayer LiIonBattery SiliconeOxide LiftHeight HighAcpectRatio ThermalConductivity Fiber SPMLabs molecule Ni-FeAlloy Yttria_stabilized_Zirconia Heating Piezo Nanostructure Conductance tip_bias_mode PDMS SurfaceChange Au111