Hafnia Molybdenum_disulfide sputter Nanopattern IISCBangalore Hafnium_dioxide OpticalWaveguides Pyroelectric Indent IMT_Bucharest TemperatureControlledAFM Bmp dielectric_trench Electrode Chungnam_National_University Conduct fluoroalkane optoelectronics Conductive AFM Force-distance FailureAnlaysis Styrene molecular_beam Tin sulfide SThM phase_change Chrome rubber silicon_oxide alkanes Cobalt CVD contact Scanning_Thermal_Microscopy Yeditepe_University