Etch WPlug mechanical property Mapping LiNbO3 LateralForceMicroscopy ito_film Gong MagneticArray SicMosfet TappingMode PolyimideFilm Barium_titanate PvdfFilm Fiber Vac PtfeFilter Monisha Pinpoint PFM KelvinProbeForceMicroscopy INSP PhthalocyaninePraseodymium 2dMaterials Jason Polyaniline CalciumHydroxide Ucl Chemical Vapor Deposition OpticalElement EFM light_emitting MechanicalProperties flakes C_AFM Ceramic