- NX-HDM
- XE-HDM
Park NX-HDM Specifications
System
Specification
Motorized XY stage
travels up to 150 mm × 150 mm, 2 µm repeatability
Motorized Z stage
25 mm Z travel distance
0.1 µm resolution, < 1 µm repeatability
Motorized Focus Stage
15 mm Z travel distance for on-axis optics
Sample Thickness Allowance
up to 20 mm
Full scan range Z run-out
< 2 nm
COGNEX Pattern Recognition
pattern align resolution of 1/4 pixel
Scanner Performances
XY Scanner Range
100 µm × 100 µm
XY Scanner Resolution
0.095 nm (20 bit position control)
Z Scanner Range
15 µm
Z Scanner Resolution
0.01 nm
AFM and XY Stage
Control Electronics
ADC
18 channels
4 high-speed ADC channels
24-bit ADCs for X,Y and Z scanner position sensor
Maximun Scan Size
4096 x 4096 pixels
DAC
12 channels
2 high-speed DAC channels
20-bit DACs for X,Y and Z scanner positioning
Vibration, Acoustic Noise, and ESD Performances
Floor Vibration
< 0.5 µm/s (10 Hz to 200 Hz w/ Active Vibration Isolation System)
Acoustic Noise
>20 dB attenuation w/ Acoustic Enclosure
Facility Requirements
Room Temperature (Stand By)
10 °C ~ 40 °C
Room Temperature (Operating)
18 °C ~ 24 °C
Humidity
30% to 60% (not condensing)
Floor Vibration Level
VC-D (6 µm/sec)
Acoustic Noise
Below 65 dB
Pneumatics
Vacuum : -60 kPa
Power Supply Rating
100/120 V/ 208~240 V, single phase, 15 A (max)
Total Power Consumption
2 KW (typical)
Ground Resistance
Below 100 ohms
Dimensions in mm
& Weight in kg
Acoustic Enclosure
880 (w) × 980 (d) × 1460 (h)
620 kg approx. (incl. basic NX-HDM System)
Control Cabinet
600 (w) × 900 (d) × 1600 (h)
170 kg approx. (incl. controllers)
System Floor Space
1720 (w) × 920 (d)
Ceiling Height
2000 or more
Operator Working Space
2400 (w) × 2450 (d), minimum (dimension unit: mm)
[ Park NX-HDM system dimension ] / [ Park NX-HDM installation layout ]Park XE-HDM Specifications
System
Specification
Motorized XY stage
travels up to 150 mm × 150 mm, 1 µm repeatability
Motorized Z stage
~30 mm Z travel distance
~0.08 µm resolution, < 1 µm repeatability
Motorized Focus Stage
11 mm Z travel distance for on-axis optics
Sample Thickness Allowance
up to 20 mm
Full scan range Z run-out
< 2 nm,repeatability < 1 nm
COGNEX Pattern Recognition
pattern align resolution of 1/4 pixel
Scanner Performances
XY Scanner Range
100 µm × 100 µm (high voltage mode)
10 µm × 10 µm (low voltage mode)
Z Scanner Range
12 μm (high voltage mode)
1.7 μm (low voltage mode)
XY Scanner Resolution
1.5 nm (high voltage mode)
<0.2 nm (low voltage mode)
Z Scanner Resolution
< 0.2 nm
AFM and XY Stage
Control Electronics
Controller Processing Unit
600 MHz and 4800 MIPS
Signal ADC & DAC
16-bit, 500 kHz bandwidth, internal lock-in
Vibration, Acoustic Noise, and ESD Performances
Floor Vibration
< 0.5 µm/s (10 Hz to 200 Hz w/ Active Vibration Isolation System)
Acoustic Noise
>20 dB attenuation w/ Acoustic Enclosure
Facility Requirements
Room Temperature (Stand By)
10 °C ~ 40 °C
Room Temperature (Operating)
18 °C ~ 24 °C
Humidity
30% to 60% (not condensing)
Floor Vibration Level
VC-D (6 μm/sec)
Acoustic Noise
Below 65 dB
Pneumatics
Vacuum: -60 kPa
Power Supply Rating
100/120 V/ 208~240 V, single phase, 15 A (max)
Total Power Consumption
2 KW (typical)
Ground Resistance
Below 100 ohms
Dimensions in mm
& Weight in kg
Acoustic Enclosure
820 (w) × 920 (d) × 1460 (h)
600 kg approx. (incl. basic NX-HDM System)
Operator Working Space
2400 (w) × 2450 (d), minimum (dimension unit: mm)
Control Cabinet
800 (w) × 800 (d) × 1030 (h)
160 kg approx. (incl. controllers)
System Floor Space
1720 (w) × 920 (d)
Ceiling Height
2000 or more
[ Park XE-HDM installation layout ]