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Metal-organicComplex NTU PS_PVAC TempControl dielectric trench Fendb InLiquid InorganicCompound Bismuth #EC ito_film ScanningIon-ConductanceMicroscopy Mechanical&nanotechnology Insulator doped Cross-section SSRM temp_control Neodymium Phosphide LightEmission NusEce SicMosfet Polyethylene Aluminum GaN mechanical_property rubber Silicon FloppyDisk KAIST plastics dielectric_trench MBE PDMS