Ca10(PO4)6(OH)2 NiFe PVAP3HT EvatecAG SPMLabs AIN SRAM Ucl SurfaceChange cross section lithography CuSubstrate Polyurethane Zhi TipBiasMode Silver Hexacontane WPlug Steps Tape UnivMaryland Polytetrafluoroethylene Yttria_stabilized_Zirconia YszSubstrate dielectric_trench PvdfBead Edwin Filter AtomicSteps Boron LowDensityPolyethylene Conductivity SmallScan ForceVolumeImage silicon_carbide