semifluorinated alkane Copolymer Adhesive Cobalt OpticalElement temperature controller AFM Vacuum Roughness Fe_film Litho TungstenThinFilmDeposition SmalScan Indent Butterfly PinpointPFM ScratchMode LMF LiIonBattery CopperFoil Optoelectronic UnivMaryland Laser PetruPoni_Institute Array Neodymium MagneticForce Non-ContactMode Alkane fe_nd_b Vortex norganic Steps Barium_titanate sputter InsulatorFilm