CVD NtuEee Deposition ring shape Phthalocyanine dielectric_trench ULCA LiIonBattery Lift Scanning_Thermal_Microscopy Mosfet Piezoelectric StrontiumTitanate Aluminum Boundary OxideLayer CntFilm piezoelectric force microscopy ThermalConductivity Ni81Fe19 AM_KPFM Current layers thermal_conductivity Inorganic_Compound molecular_beam Genetic China Strontium Ptfe Hysteresys Regensburg Tapping Magnetic Force Microscopy Annealing