NanoLithography Copper UTEM PvdfFilm gallium_nitride Gallium DeflectionOptics Piranha pulsed_laser_deposition Plug temperature controller AFM BCZT Glass Magnets STO Boundary Fet Conductive AFM Pzt SSRM oxide_layer Typhimurium Mobile ThinFilm AmplitudeModulation thermoplastic_elastomers DIWafer LiquidCrystal Alloy OxideLayer Vacuum Litho Transparent Film MeltingPoint