MESA structure Annealing PhaseTransition Treatment PinpointPFM Vac molecule Inorganic LightEmission CrossSection Bio TempControl Fet Pinpoint Lateral_Force_Microscopy semifluorinated_alkanes kelvin probe force microscopy ShenYang Film Organic PrCurve CVD CrAu vertical_PFM LDPE PDMS Thermal Composition PVAC NCM\ ito_film AtomicLayer Cancer Al2O3 Ferroelectric