Piranha SiliconCrystal lithography pinpoint mode MoirePattern Worcester_Polytechnic_Institute Pvdf Pinpoint PS_PVAC Oxidation ForceVolume SrO Gong OxideLayer Layer SingleLayer HighAcpectRatio EvatecAG high_resolution HfO2 GlassTemp self-assembled_monolayer ito_film STM norganic silicon_oxide SurfaceChange phase_change Vortex ForceDistanceSpectroscopy Granada PpLdpe Metal-organicComplex Singapore MultiferroicMaterials