Inorganic Defect Electronics HardDiskMedia PyroelectricDetector CaMnO3 Wang Regensburg Alloy Holes InorganicCompound piezoelectric force microscopy Sidewall Ceramic INSP ScanningKelvinProbeMicroscopy fluorocarbon MoS2 align Layer Piezo Self-assembledMonolayer self_healing CntFilm ThinFilm temperature controller AFM Materials LowDensityPolyethylene gallium_nitride SRAM Conducting GlassTemp ReflexLens norganic LateralForce