EvatecAG aluminum_nitride HighAcpectRatio PtfeFilter Pzt BiFeO3 Growth WWafer NCM\ LateralPFM hydrocarbon LiftHeight Gallium_Arsenide DNA Chloroform PatternedSapphireSubstrat ThermalProperties Lateral Tungsten Silver OpticalElement MembraneFilter SICM ScanningKelvinProbeMicroscopy C_AFM Laser FM_SKPM Hydroxyapatite DOE Dopped Fiber MetalCompound TemperatureControlledAFM ForceVolumeImage atomic_layer