SICM Optoelectronic Chemical Vapor Deposition YttriaStabilizedZirconia BCZT Copolymer Genetic silicon_carbide ElectroChemical VerticalPFM VinylAlcohol HfO2 epitaxy MetalCompound Molybdenum_disulfide HexacontaneFilm ElectrostaticForceMicroscopy TemperatureControllerStage semifluorinated_alkane HDD Heating TriGlycineSulphate Mechanical HardDiskMedia HiVacuum pinpoint mode NUS BTO HACrystal AIN lithography KevlarFiber Anneal Flake CopperFoil