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mechanical property small_scan MESA structure piezoelectric force microscopy Fe_film Pinpoint PFM dielectric trench TappingMode TCS Cobalt Hafnium_dioxide HydroGel Ferrite LightEmission PtfeMembrane Forevision chemical_compound Chrome PVAP3HT Anneal ULCA LateralForceMicroscopy FFM PyroelectricDetector GlassTemp Lanthanum_aluminate BCZT Bmp I-VSpectroscopy vertical_PFM Gallium_Arsenide DeflectionOptics UnivMaryland MagneticPhase ReflexLens