Inorganic_Compound Microchannel Sio2 TungstenThinFilmDeposition PMNPT multi_layer Techcomp DOE Adhesive SmalScan mechanical property FloppyDisk NiFe ImideMonomer OpticalWaveguide STM Holes PS_PVAC SiWafer cross section Wang semifluorinated_alkanes SmallScan Liquid MechanicalProperty HanyangUniv EFM H-BN EvatecAG BismuthVanadate Composition Temasek_Lab Pyroelectric molecule dichalcogenide