MLCC HanyangUniv polymeric_arrays BFO temperature_control multi_layer Ca10(PO4)6(OH)2 HOPG ito_film BariumTitanate Yeditepe_University Austenite Mechanical DentalProsthesis VinylAlcohol Vacuum Patterns ForceVolumeMapping hetero_structure OpticalWaveguide ThermalDetectors Stiffness PMNPT Trench DIWafer SmallScan Oxidation piezoelectric force microscopy DataStorage AEAPDES oxide_layer CntFilm Electrode Indium_tin_oxide ThermalProperties