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SiWafer CuSubstrate PiezoelectricForceMicroscopy frequency_modulation BariumTitanate Defects Bmp Mechanical&nanotechnology MagneticForce MetalCompound Etch Tin disulfide TungstenDeposition Chemical_Vapor_Deposition UTEM GlassTemp LogAmplifier PolymerBlend NUS_Physics Topography HardDisk phase_change HanyangUniv HfO2 cooling Transparent AmplitudeModulation Terrace sputter Battery Carbon Layer Bio mfm_amplitude PvdfFilm