Atomic force microscopy (AFM) has become a more and more popular tool for nano-scale measurement across various field of studies. Using the AFM, sample’s properties can be measured and assessed to meet the requirements for each specific application. Despite the power and versatility, resistance that hinders the adoption of AFM remains. Conventional AFM operating softwares are relatively difficult to set-up and operate, especially for new user. To properly control the AFM, specialized trainings which require time and resources are required.

To reduce such efforts, Park Systems has built an innovative AFM operating software named SmartScanTM. The philosophy of SmartScan is to make AFM using experience as simple as point and click actions to control a computer. SmartScan has an Auto mode which implements automation in most of the steps required to get AFM image. User only need to set-up the tip and sample, point to a target area, and click a button to automatically collect the data. An expert-level high quality image can be obtained in only a fraction of time spent with the instrument. To achieve this, SmartScan employs the proprietary True Non-ContactTM imaging mode along with AdaptiveScanTM technique to automate and optimize the imaging procedure.

For cases that require repeated or multi-area measurement, Park StepScanTM function provides an easy set-up for automated measurements. User can add the area of interest by a simple mouse click while keeping full control of scan parameters such as scan mode, set point, scan size, speed, or resolution at each single area. This helps reducing the time spent with the instrument and leaving you more time for research.
In this webinar, we would like to introduce you the Park SmartScan AFM operating software. In particular, we will be presented the user interface and automation functions of the software. Also, a demonstration session on how to use the software to automatically measure the sample will be provided as a practical example.

Presented By : 
Rocky Nguyen, Park Systems Korea

Dr. Rocky Nguyen received his Ph.D. degree in Mechanical and Automotive Engineering from the University of Ulsan in South Korea and his Bachelor’s degree in Materials Engineering from Back Khoa University in Vietnam. He is currently focused on the development and performance optimization of atomic force microscopy and related techniques at Park Systems Korea.

Defining a dopant concentration been the key factor to understand a semiconductor device performance. In an effort of minimize scale of electric devices, memory devices or display panel has just a few nano size with atoms layered in 2D structure or 3D structure. To investigate these small structures, resolution is important as well as accuracy of measurement system.

Scanning capacitance microscopy (SCM) is the most adequate technique to measure the capacitance distribution on material surface which has the resolution of nanometer scale. Park systems’ enhanced scanning technique helps to acquire accurate capacitance signal without artifacts from tip-sample charging effect or stray capacitance noise.

In this talk, we demonstrate a full SCM analysis on a sample with various doping concentration range. In addition, advanced scanning method like ‘Quickstep’ and ‘Pinpoint’ will be adapted to the measurement to maximize accuracy and throughput of the data.

Presented By : 
Zoe Kim, Park Systems Korea

Zoe Kim is an application engineer at Park Systems Korea, her role includes but is not limited to surface inspection and mechanical lithography on display panel, semi-conductor devices, and battery samples with electrical, mechanical, and thermal analysis. She is also assigned in writing technical articles for publications. She received her Bachelor's Degree in Physics from Incheon National University and her Master's degree from Sungkunkwan University, South Korea.

主讲人： 
胡万培博士

胡万培，中国科学技术大学材料系博士，师从杨上峰教授。主要研究方向是有机无机杂化钙钛矿太阳能电池的界面改性和新型无铅钙钛矿太阳能电池。以第一作者在Advanced Materials, Nano Energy, Trends in Chemistry, Advanced Science上发表研究论文4篇。